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晶圓拋光用綠色碳化矽微粉

$3,000.00 /MT

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綠色碳化矽（SiC）粉末是半導體晶圓拋光所使用的關鍵材料。由於其具有高硬度、優異的化學穩定性和熱穩定性，被廣泛應用於精密拋光製程。

1.綠碳化矽的特點

—硬度高（莫氏硬度9.2）：僅次於鑽石和立方氮化硼，適合加工硬質材料（如矽、碳化矽晶片）。

—化學惰性：常溫下不與酸、鹼反應，避免晶圓表面污染。

—熱穩定性：在高溫下仍能保持性能，適合高速拋光。

–尖銳的顆粒形狀：提供高效的切割能力，但需要控制顆粒均勻性以避免刮傷。

典型化學分析
碳化矽≥99.05%
二氧化矽≤0.20%
氟、矽≤0.03%
氧化鐵≤0.10%
足球俱樂部≤0.04%
典型物理特性
硬度：莫氏硬度：9.5
熔點：2600℃昇華
最高使用溫度：1900℃
比重：3.20-3.25克/立方厘米
體積密度（LPD）：1.2-1.6克/立方厘米
顏色：綠色的
顆粒形狀：六角形

2.在半導體拋光的應用

—粗拋光階段：用於去除晶圓表面較大的缺陷或加工痕跡（如切片、研磨後的損傷層）。

—碳化矽（SiC）晶片拋光：綠色碳化矽與SiC晶片材料硬度相匹配，以減少表面損傷。

—輔助應用：用於藍寶石基板、光學玻璃等硬脆材料的拋光。

3.關鍵品質要求
—粒徑分佈：需高度均勻（如D50 1–5μm），避免因顆粒過大造成刮痕。

—純度：純度高（≥99.9%），減少金屬雜質（如Fe、Al）的污染。

—顆粒形貌：需要是球形或等面積的，以降低表面粗糙度。

—懸浮液：在拋光液中穩定分散，防止沉澱。

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